Abstrak
Includes Proceedings Vol. 7821
Kata kunci
Microelectromechanical systems
BookOpen AccessTerbit 2017Versi 1
Micro- and Nanotechnology Sensors, Systems, and Applications III
Informasi bibliografis
| Identifier OAI | oai:ais:library-item:79125 |
|---|---|
| Jenis dokumen | Book |
| Bahasa | en |
| Koleksi | Koleksi Perpustakaan |
| dc.subject | Microelectromechanical systems |
| dc.publisher | SPIE-International Society for Optical Engineering |
| dc.type | Book |
| dc.rights.access | OPEN_ACCESS |
| dc.date.issued | 2017-08-31 |
Versi dan riwayat publik
- Versi 1Micro- and Nanotechnology Sensors, Systems, and Applications III2017 · oai:ais:library-item:79125